Shkarban R.A.

Formation of phase composition and structure in nanosize thin film compositions CoSb([sub]1,82–2,51[/sub])(30 нм)/SiO[sub]2[/sub](100 нм)/ Si(001) – functional elements of thermionics

By the methods of x-ray photography diffraction, scanning electron microscopy, atomic-power microscopy and resistometry, we investigate the processes of phase formation and structure in CoSb(1,82–2,51)(30 nm) thin film on the single-crystal silicon of Si(001) substrate with the SiO2(100 nm) oxide layer.